 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
hai 2 meses |
|
lixiang
|
38b40b702d
1.修复all in all out 不做cooling bug
|
hai 4 meses |
|
lixiang
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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hai 5 meses |
|
lixiang
|
a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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hai 6 meses |
|
lixiang
|
ca702b093b
1.alarm List 收集到300+条，并添加到程序里
|
hai 7 meses |
|
lixiang
|
8e660cd7a8
1.去除carrierid ;字符
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hai 7 meses |
|
lixiang
|
d6b8d32004
1.修复不能跑atm模式的bug
|
hai 7 meses |
|
lixiang
|
a9d8e56970
1.扩展alarm list
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hai 7 meses |
|
lixiang
|
79ffe0c064
1.分开Kepler与Venus SequenceView界面
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hai 8 meses |
|
lixiang
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
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hai 8 meses |
|
lixiang
|
b67769ec2c
ui优化
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hai 8 meses |
|
lixiang
|
99d939492e
1.加登出界面
|
hai 9 meses |
|
lixiang
|
ced69ea3b9
新版本Recioeview界面开发
|
hai 9 meses |
|
lixiang
|
652daaa81a
cycle uncheck bug修复
|
hai 9 meses |
|
lixiang
|
5ce110574e
1，添加cooling功能
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hai 9 meses |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
hai 10 meses |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
hai 10 meses |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
hai 10 meses |
|
lixiang
|
9163903164
Kepler2200优化
|
hai 10 meses |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
hai 11 meses |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
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hai 11 meses |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
hai 11 meses |
 hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
hai 11 meses |
|
lixiang
|
3e00375ce8
1.FDC代码逻辑移到PricessDefine
|
hai 11 meses |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
hai 1 ano |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
hai 1 ano |
|
lixiang
|
7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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hai 1 ano |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
hai 1 ano |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
|
hai 1 ano |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
hai 1 ano |
