 lixiang
|
f92e6abb17
1.添加Kepler2300 功能代码
|
3 mesi fa |
 zhouhr
|
3aee4d6673
1. Add the function of StatsDataManager in UI,RT
|
9 mesi fa |
|
lixiang
|
99d939492e
1.加登出界面
|
9 mesi fa |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 mesi fa |
|
lixiang
|
9163903164
Kepler2200优化
|
10 mesi fa |
|
lixiang
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
1 anno fa |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
|
1 anno fa |
 Intern01
|
171eef8acc
Add to chart@@to slot switch page function
|
1 anno fa |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
1 anno fa |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
1 anno fa |
 sangwq
|
d22b60372f
Debug devices on tools
|
2 anni fa |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 anni fa |
|
sangwq
|
3f8df8cade
DEVICE UPDATE
|
2 anni fa |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 anni fa |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 anni fa |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 anni fa |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 anni fa |
|
sangwq
|
c8cfb4008d
check in HV, PendulumValve, TurboPump drivers.
|
2 anni fa |
