 lixiang
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031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
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2 months ago |
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lixiang
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f92e6abb17
1.添加Kepler2300 功能代码
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3 months ago |
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lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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4 months ago |
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lixiang
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10c22069fe
1.添加EFEM光栅报警开关
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6 months ago |
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lixiang
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a38cb6d743
1.Revtech Match 通讯时间100ms改为300ms
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6 months ago |
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lixiang
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ca702b093b
1.alarm List 收集到300+条，并添加到程序里
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7 months ago |
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lixiang
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8e660cd7a8
1.去除carrierid ;字符
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7 months ago |
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lixiang
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a9d8e56970
1.扩展alarm list
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7 months ago |
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lixiang
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b67769ec2c
ui优化
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8 months ago |
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lixiang
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99d939492e
1.加登出界面
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9 months ago |
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lixiang
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5ce110574e
1，添加cooling功能
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9 months ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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10 months ago |
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lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 months ago |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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11 months ago |
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lixiang
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
