 lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
 hecl
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0b8a98a845
IoDevice IoMagnet Add
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1 year ago |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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hecl
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eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
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1 year ago |
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lixiang
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f8026cadbc
控压结束动作bug修复
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1 year ago |
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lixiang
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967f6b6b9c
添加控压结束，保持一秒流气功能
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1 year ago |
 chenkui
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
 zhouhr
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e8e04e07b5
Change cast way by Enum Name for SEPMView.
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 year ago |
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lixiang
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ab095ba2a8
修复钟摆阀状态错误bug
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1 year ago |
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lixiang
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649ac00032
添加rfmatch/biasrfmatch自动计算c1/c2功能
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1 year ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
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lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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1 year ago |
 sangwq
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69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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1 year ago |
