 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
vor 1 Jahr |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
|
vor 1 Jahr |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
vor 1 Jahr |
|
zhouhr
|
e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
|
vor 1 Jahr |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
vor 1 Jahr |
|
zhouhr
|
5a2ac08f6f
fix bug in MoveWafer Dialog && SEMFPickRoutine
|
vor 1 Jahr |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
vor 1 Jahr |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
vor 2 Jahren |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
|
vor 2 Jahren |
