Commit History

Author SHA1 Message Date
  lixiang 7556c43a4c 1.Gas漏气检测结束ui界面不更新bug修复 9 months ago
  lixiang ca702b093b 1.alarm List 收集到300+条,并添加到程序里 10 months ago
  lixiang 79ffe0c064 1.分开Kepler与Venus SequenceView界面 10 months ago
  zhouhr 3aee4d6673 1. Add the function of StatsDataManager in UI,RT 11 months ago
  lixiang ced69ea3b9 新版本Recioeview界面开发 1 year ago
  lixiang 5ce110574e 1,添加cooling功能 1 year ago
  lixiang 3fb3984bd3 1.添加 Heater 伺服到位信号,手臂进腔前check 1 year ago
  lixiang 2136e3b838 1.分开kepler与Venus 漏气检测ui,删除多余代码 1 year ago
  hecl c1ae6b6ea1 1.Fix Chamber DE recipe process bugs 1 year ago
  lixiang 464c53cd94 1.Datalog添加高温Haeter开关显示 1 year ago
  lixiang c671c999c0 ui界面优化 1 year ago
  lixiang 608cf43d67 1.做工艺前pump down 根据底压确定是否执行 1 year ago
  lixiang d33079596b 1.优化新版跑片动画 1 year ago
  hecl 996eacc709 VenusDE recipe tolerance enhance 1 year ago
  lixiang 3e00375ce8 1.FDC代码逻辑移到PricessDefine 1 year ago
  lixiang 07b8ea7e19 让fdc只支持Process Type 1 year ago
  lixiang a98efc8a0b 1.修改kepler2300 FDC 运行报错bug 1 year ago
  lixiang 17ae6db63c kepler2200/Kepler2300 添加FDC 功能 1 year ago
  lixiang 4634f3f91a 1。设置log最大500M,超出分文件(解决文件太大,log打不开) 1 year ago
  lixiang 7e15cb64a0 1.Recipe 添加 Stable/OverEtch 功能 1 year ago
  lixiang d35b997884 1.优化RevtechMatch状态机 1 year ago
  lixiang 6bbe2e529b 1.删除或注释 Venus ChamberType 1 year ago
  lixiang 8b6a73425d 添加Start job 前check kepler2200 高温Heater温度 1 year ago
  chenkui 563a30f852 1、add recipe event notify; 1 year ago
  lixiang d4d56a3cf3 1.添加Recipe内部外部名称,chamberTYpe 比对 1 year ago
  hecl 945ce3c74c 1.Venus SE DE Add PressureControl 1 year ago
  lixiang 1929a3510b 1.新版ui界面开发 1 year ago
  lixiang 6d6f659b77 1.Kepler2200 TM/PM控大压力10Pa,添加工艺结束,等待压力稳定(TM/PM压差满足要求)TM再Pick功能 1 year ago
  lixiang bdcf0556c9 1.将kepler2200与其它项目配置文件分开 1 year ago
  lixiang 68b4ba9640 1.添加mtorr与Pa切换功能 1 year ago