 hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 year ago |
 lixiang
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
1 year ago |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
|
lixiang
|
3f6c65223f
1.删除部分不需要插入数据库数据
|
2 years ago |
|
lixiang
|
b5616b7378
解决冲突，合并代码
|
2 years ago |
|
lixiang
|
bdec2c0d74
1.修改TM robot模拟器
|
2 years ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
|
lixiang
|
fce40bc900
1.解决分子泵/chiller在线显示bug
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
2 years ago |
|
lixiang
|
796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
|
2 years ago |
|
lixiang
|
bb33e89998
1，优化UI界面
|
2 years ago |
|
lixiang
|
ccb4444fa8
添加部分ui按钮控制rt功能
|
2 years ago |
|
lixiang
|
65b982deaf
优化漏气check界面
|
2 years ago |
|
lixiang
|
081ab4daa5
添加多个UI界面
|
2 years ago |
