 sangwq
|
72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
|
9 meses atrás |
 lixiang
|
5ce110574e
1，添加cooling功能
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10 meses atrás |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 meses atrás |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 meses atrás |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
11 meses atrás |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 ano atrás |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
1 ano atrás |
 zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
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1 ano atrás |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
1 ano atrás |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
1 ano atrás |
|
sangwq
|
b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 anos atrás |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 anos atrás |
