 lixiang
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708d655cae
1.将Kepler/Venus DeviceModel里面的ProcessGauge与PressureGauge重新定义
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1 year ago |
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lixiang
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cb91599d02
修复recipe Ui信息显示
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1 year ago |
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lixiang
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a5813eb09d
1.修改chamber wafer样式
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1 year ago |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
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lixiang
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
 sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 years ago |
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sangwq
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241a8a2f5d
UPDATE 20230324
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
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lixiang
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7a6556869f
1.整理主界面UI
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2 years ago |
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sangwq
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6187ad5b4f
Interlock 优化
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2 years ago |
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lixiang
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1f1fb71be3
1.2023/02/17现场rt代码修改
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2 years ago |
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sangwq
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d22b60372f
Debug devices on tools
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2 years ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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b17ae64e6b
1.添加topview LOG显示功能
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2 years ago |
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sangwq
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c4864f5546
debug gas verification.
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2 years ago |
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lixiang
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60d08c1285
1.ui与rt联动功能添加
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2 years ago |
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lixiang
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bad994820a
添加PM与部分loadlock与rt交互功能
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2 years ago |
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sangwq
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888ad3ea20
revolve conflict.
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2 years ago |
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sangwq
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a244b205b9
Gas Flow and RF Power routine.
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2 years ago |
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lixiang
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ccb4444fa8
添加部分ui按钮控制rt功能
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2 years ago |
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sangwq
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c3154ba629
wafer manager.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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847220c6ce
update for initial recipe design
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2 years ago |
