 lixiang
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6447434c5b
Venus代码删除
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7 months ago |
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lixiang
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add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
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8 months ago |
 zhouhr
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ff6df5295a
add SunWay VCE && TMRobot and change by the configitem of VCEX.VceType && TM.TMType.
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8 months ago |
 sangwq
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09e8c5db30
Fix the post clean not running bug.
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1 year ago |
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zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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1 year ago |
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sangwq
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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1 year ago |
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sangwq
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e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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1 year ago |
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sangwq
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9144014f90
enhance the routing algorithm and module online/offline control logic.
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1 year ago |
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sangwq
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5b037046f9
Add TM/LL modules.
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2 years ago |
