 lixiang
|
4a6cf3aa4c
pm interlock报错修改
|
1 year ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
|
1 year ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
|
1 year ago |
|
lixiang
|
179f80c29a
1.endpoint by wcf 添加修改配置文件界面
|
1 year ago |
|
lixiang
|
f3bd6b016b
添加部分efem功能
|
2 years ago |
 sangwq
|
aaf8372896
兼容 两种 endpoint, 未完成
|
2 years ago |
|
sangwq
|
16f00701e5
Redesign Recipe module.
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 years ago |
|
lixiang
|
c060fde154
1.Recipe Edit 添加配置功能
|
2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
sangwq
|
4e8a55f733
Endpoint Module.
|
2 years ago |
|
sangwq
|
3222fa143a
Process module and Interlock .
|
2 years ago |
|
sangwq
|
d8e5f1dc2c
2022 last update
|
2 years ago |
|
sangwq
|
0050803370
update process Module
|
2 years ago |
