 lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
 zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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lixiang
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7c5d66a96d
右击wafer报错bug修复
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1 year ago |
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lixiang
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894ff76d5e
online/offline tobview状态颜色变化
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1 year ago |
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lixiang
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a2426eb90b
Recipe 添加bias step ramp设值功能
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1 year ago |
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lixiang
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0af54acc48
Recipe 每个模块做成ui可配，设计clean recipe模块，Kepler2200 模拟器recipe工艺测试
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1 year ago |
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lixiang
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20cc441578
1.kepler2200 ui优化
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1 year ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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1 year ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 year ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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1 year ago |
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lixiang
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72ac29dac2
1.优化PMC Kepler2200A界面
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1 year ago |
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lixiang
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b96ac701fb
1.添加TM Simulator
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1 year ago |
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lixiang
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179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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1 year ago |
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lixiang
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3a078d515d
1.修复ui灯闪烁错误bug
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1 year ago |
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lixiang
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fce40bc900
1.解决分子泵/chiller在线显示bug
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1 year ago |
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lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
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lixiang
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24fac8d71d
recipe edit新界面制作
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1 year ago |
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lixiang
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6579ef1d85
解决冲突
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2 years ago |
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lixiang
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3b8277256c
1.recipeHead添加expand
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2 years ago |
 sangwq
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4e8a55f733
Endpoint Module.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
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sangwq
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d8e5f1dc2c
2022 last update
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2 years ago |
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lixiang
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5e89c4da73
优化recipe代码
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2 years ago |
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lixiang
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ee80e1676c
解决冲突
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2 years ago |
