 lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 year ago |
 sangwq
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210098481b
fix the routing bug which missing calling RouteTo().
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1 year ago |
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sangwq
|
b85b9aa79f
fix some routing bugs.
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1 year ago |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
 chenkui
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d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
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1 year ago |
|
chenkui
|
563a30f852
1、add recipe event notify;
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1 year ago |
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sangwq
|
3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
|
1 year ago |
|
sangwq
|
709c7a1c10
fixed the routing bug while B In B Out.
|
1 year ago |
|
sangwq
|
614fe9104b
Transfer PM wafer while PMTask status not update to idle.
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1 year ago |
|
sangwq
|
78ec8de62c
fix the bug which pm wafer been transfer out without processed.
|
1 year ago |
|
sangwq
|
6d393bb86d
new routing algorithm with prediction.
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1 year ago |
|
chenkui
|
63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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1 year ago |
|
sangwq
|
9189e1b51f
new routing algorithm update.
|
1 year ago |
|
chenkui
|
5740a76224
1、ControlJobInfo类增加了SequenceNameList,解决LoadPort UI中Sequence显示问题
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1 year ago |
|
chenkui
|
5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
|
sangwq
|
c3ef1d5a6e
Wafer loadlock delay function.
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1 year ago |
|
chenkui
|
a3f01b0830
1、重新引用最新版本的SecsGem动态库，用于实现FA相应的功能；
|
1 year ago |
|
sangwq
|
db34e04302
missing SystemDispatcher.cs
|
1 year ago |
