 lixiang
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5ce110574e
1，添加cooling功能
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hai 10 meses |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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hai 11 meses |
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lixiang
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9163903164
Kepler2200优化
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hai 11 meses |
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lixiang
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1929a3510b
1.新版ui界面开发
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hai 1 ano |
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lixiang
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
hai 1 ano |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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hai 1 ano |
|
lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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%!s(int64=2) %!d(string=hai) anos |
 sangwq
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8565810192
Servo Pressure and Gas Flow done.
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%!s(int64=2) %!d(string=hai) anos |
