 zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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vor 11 Monaten |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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vor 11 Monaten |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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vor 11 Monaten |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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vor 1 Jahr |
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hecl
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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vor 1 Jahr |
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zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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vor 1 Jahr |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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vor 1 Jahr |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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vor 1 Jahr |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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vor 1 Jahr |
