 zhouhr
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632f566bc6
fix bug in SEMFSwapRoutine
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11 月之前 |
|
zhouhr
|
6cd541ac40
fix the bug in SE Pick/Place Routine
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11 月之前 |
|
zhouhr
|
cc04adb731
change the location of the PA from VPA to Aligner1
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11 月之前 |
|
zhouhr
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1f725dcb61
fix bug in VCE2LP
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11 月之前 |
|
zhouhr
|
d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 月之前 |
 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
 sangwq
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2edb43d393
fix the crash issue.
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11 月之前 |
|
sangwq
|
f8336dc16b
fix the crash issue in SETMScheduler.
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11 月之前 |
|
sangwq
|
bcbd783654
avoid crash issue for temporary fix.
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11 月之前 |
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sangwq
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75b6c4548e
submit new venus routing algorithm.
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11 月之前 |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
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11 月之前 |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
|
lixiang
|
34958e5963
swap 压差计算log测试
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11 月之前 |
|
lixiang
|
d938a9e54c
PM/TM swap pick 开门前加压力wait
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11 月之前 |
|
lixiang
|
9e9459c927
efem界面按钮功能优化
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11 月之前 |
|
lixiang
|
5a4c70257b
1.Recipe 添加给eap recipe的内容
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11 月之前 |
|
lixiang
|
c671c999c0
ui界面优化
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11 月之前 |
|
lixiang
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 月之前 |
 hecl
|
0f361d7301
1.Fix SETM robot ArmExtend bugs
|
11 月之前 |
|
sangwq
|
1ff7394c30
Fix the ATM cycle blocking bug.
|
11 月之前 |
|
sangwq
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03770198be
Skip auto Vent/pump while ATM mode.
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11 月之前 |
|
sangwq
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5d9198550f
Enhance the throughput with align sequence.
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11 月之前 |
|
zhouhr
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 月之前 |
|
lixiang
|
ed7c537c19
1.添加TM/LLA/LLB 平衡阀
|
11 月之前 |
|
hecl
|
f814cf53a8
1.Add simulator read RF ConfigType function
|
1 年之前 |
|
lixiang
|
d33079596b
1.优化新版跑片动画
|
1 年之前 |
|
sangwq
|
54ed40c8b1
enhance kepler throughput
|
1 年之前 |
|
zhouhr
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
1 年之前 |
|
sangwq
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82703d4497
enhance throughput with loadlock delay.
|
1 年之前 |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 年之前 |
