 sangwq
|
9189e1b51f
new routing algorithm update.
|
il y a 1 an |
|
sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
il y a 1 an |
|
sangwq
|
ec2f97e62d
enhance log.
|
il y a 1 an |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
il y a 1 an |
|
sangwq
|
c3bef13a6e
Enhance Auto pump/vent algorithm.
|
il y a 1 an |
 lixiang
|
9e1de0e343
1.run recipe 参数bool改recipetype
|
il y a 1 an |
|
sangwq
|
7d93bf0076
Job Clean function, not finished.
|
il y a 1 an |
|
sangwq
|
a35c5b1224
enhance routing algorithm.
|
il y a 1 an |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
il y a 1 an |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
il y a 2 ans |
