 zhouhr
|
c3c6427c4d
show names from Gas 9 to Gas 12 in recipe.
|
1 gadu atpakaļ |
 sangwq
|
b11dfcec1e
Load configure value for Loadlock slot in out option.
|
1 gadu atpakaļ |
|
sangwq
|
a05e9eaa1b
Loadlock/TM Robot slot In/Out Options.
|
1 gadu atpakaļ |
 lixiang
|
87f1121180
1.Recipe UI 界面Name优化
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1 gadu atpakaļ |
 hecl
|
8b0b067448
Add chamber ISO valve status
|
1 gadu atpakaļ |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 gadu atpakaļ |
|
lixiang
|
d35b997884
1.优化RevtechMatch状态机
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1 gadu atpakaļ |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 gadu atpakaļ |
|
hecl
|
ed38ed5c95
1.check load function bugs fix
|
1 gadu atpakaļ |
 chenkui
|
774c804aa9
fixed pm event occurs carrierid is null
|
1 gadu atpakaļ |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 gadu atpakaļ |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 gadu atpakaļ |
|
sangwq
|
210098481b
fix the routing bug which missing calling RouteTo().
|
1 gadu atpakaļ |
|
sangwq
|
d9a23a44a2
ChamberType dismatch.
|
1 gadu atpakaļ |
|
sangwq
|
f1d081394f
introduce the chamber type/Temperature to SchedulerPM
|
1 gadu atpakaļ |
|
sangwq
|
b85b9aa79f
fix some routing bugs.
|
1 gadu atpakaļ |
|
chenkui
|
25f21eaf52
1、fixed PortWaferStart notify event parameter carrierId is null
|
1 gadu atpakaļ |
|
lixiang
|
8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
|
1 gadu atpakaļ |
|
lixiang
|
0f0650b80f
1.PM 界面 run recipe 变为手动模式
|
1 gadu atpakaļ |
|
chenkui
|
49d9d6dd18
1、fixed ControlState Data;
|
1 gadu atpakaļ |
|
chenkui
|
cc41474996
1、add WaferStart sequenceId information
|
1 gadu atpakaļ |
|
chenkui
|
7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
|
1 gadu atpakaļ |
|
chenkui
|
d4a031af0e
1、change PortWaferstart/PortWaferEnd event to WaferArrived/WaferLeved event
|
1 gadu atpakaļ |
|
chenkui
|
563a30f852
1、add recipe event notify;
|
1 gadu atpakaļ |
|
chenkui
|
e66b927c1a
1、fixed PMA and PMC send message twice bug
|
1 gadu atpakaļ |
|
chenkui
|
ba5ff5cd67
1、Simulator datagrid keep last log;
|
1 gadu atpakaļ |
|
chenkui
|
022b90d66b
1、fixed simulator memory overflow bug
|
1 gadu atpakaļ |
|
lixiang
|
6d84fd8e38
修复UI LP2/LP3不能工作 bug
|
1 gadu atpakaļ |
|
sangwq
|
3cb931b12b
fix the routing bug while multiple In Out pattern sequence, and the bug for return all wafer.
|
1 gadu atpakaļ |
|
lixiang
|
d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
|
1 gadu atpakaļ |
