 lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 year ago |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 year ago |
 hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
1 year ago |
|
lixiang
|
ef3841f212
atm模式移除PM控压
|
1 year ago |
|
hecl
|
78c80a0896
fix bugs
|
2 years ago |
|
hecl
|
7e0a676b69
Improve datalog performance
|
2 years ago |
|
hecl
|
8e5ec35137
Add tansfer checkpage add fix bug about show step
|
2 years ago |
 Intern01
|
4d950d1f31
Fix some bugs about PM process data
|
2 years ago |
|
Intern01
|
9c618d6866
DataHistory&&ProcessDataHistory update
|
2 years ago |
|
Intern01
|
33f3e3a72e
1.complete parameters writing in pm routine
|
2 years ago |
|
Intern01
|
171eef8acc
Add to chart@@to slot switch page function
|
2 years ago |
|
Intern01
|
004b31d77e
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
lixiang
|
7fe847dfd8
1.分开Venus/Kepler OverView界面，之前公用一个Overview界面
|
2 years ago |
|
Intern01
|
23c59d3c86
1.完成FA模块的功能开发
|
2 years ago |
|
lixiang
|
6dd42b5fb0
添加process数据分析功能
|
2 years ago |
|
Intern01
|
8a99234204
1.增加prcocessdatahistory 页面GridSplitter，excel导出等功能，增加FA界面
|
2 years ago |
|
Intern01
|
f61d947399
1.增加侧边参数选择与recipe选择下拉框
|
2 years ago |
|
Intern01
|
cd8d139b3e
1.添加PrecessHistory界面与读取process_data表批次信息对应数据值信息线性图展示功能
|
2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
|
2 years ago |
