 lixiang
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 year ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
 zhouhr
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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1 year ago |
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lixiang
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46aa26403c
优化压差开siltdoor功能
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1 year ago |
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lixiang
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fc317f2d07
添加控压状态，开关slitdoor，check压差的功能
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1 year ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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1 year ago |
 yangdb
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045eae5c75
1.sequence和recipe修改日志输出格式
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1 year ago |
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lixiang
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39fe214261
1.完善PartialPressure 功能
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2 years ago |
 sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
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sangwq
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2b930e56b9
Log output for exception.
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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a5245356d0
source files
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2 years ago |
