 lixiang
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00d42e8c17
efem动画优化
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2 years ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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2 years ago |
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lixiang
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
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lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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93b4531b7b
robot 不能home问题提交
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2 years ago |
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lixiang
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
