 hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
преди 1 година |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
преди 1 година |
 zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
преди 1 година |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
преди 1 година |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
|
преди 1 година |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
преди 1 година |
