 lixiang
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5ce110574e
1，添加cooling功能
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10 miesięcy temu |
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lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 miesięcy temu |
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lixiang
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9163903164
Kepler2200优化
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10 miesięcy temu |
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lixiang
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464c53cd94
1.Datalog添加高温Haeter开关显示
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11 miesięcy temu |
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lixiang
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34958e5963
swap 压差计算log测试
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11 miesięcy temu |
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lixiang
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d938a9e54c
PM/TM swap pick 开门前加压力wait
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11 miesięcy temu |
 sangwq
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2826cd9348
Enhance the duplicated wafer function.
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1 rok temu |
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sangwq
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2de3872723
duplicated wafer function.
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1 rok temu |
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sangwq
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52349cad2b
Duplicated wafer functions.
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1 rok temu |
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lixiang
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 rok temu |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 rok temu |
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lixiang
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5c5936c32c
1.修复mfc verification单点ui不显示bug
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1 rok temu |
|
lixiang
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95f5be1ca4
1.修复iomfc writemode的合并冲突bug
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1 rok temu |
|
lixiang
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e818b037a2
1.修复TM Swap 不能开门/状态比对不过bug
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1 rok temu |
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sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 rok temu |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 rok temu |
|
lixiang
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c48ba3a928
添加初版kepler2200A Pick/Place功能（PLC点位未跟新）
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1 rok temu |
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sangwq
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2694bdc96c
Enhance the Pre-rotation function
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1 rok temu |
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sangwq
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baeae1636e
TM Robot PreRotation function for particle and throughput issues.
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1 rok temu |
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sangwq
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03063bae6a
Enhance the routine framework.
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1 rok temu |
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sangwq
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8f9b95ae8f
Develop transfer cycle.
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1 rok temu |
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lixiang
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072e5d0d01
ui Module TM 名变TMRobot
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1 rok temu |
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sangwq
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8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
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1 rok temu |
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sangwq
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2663cfc1d9
Add place/pick delay.
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1 rok temu |
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sangwq
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ed992dd631
Enhance the Log Info
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1 rok temu |
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sangwq
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b741650da1
TM Cycle ready.
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1 rok temu |
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sangwq
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44ec74603f
TM Transfer
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2 lat temu |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 lat temu |
