 sangwq
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
 hecl
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e2c4a51efe
1.Add VenusDE JetVenusDEPM control
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1 year ago |
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sangwq
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b71003a42d
Fix the increasing aligner angle out of range bug.
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1 year ago |
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sangwq
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
 zhouhr
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
 lixiang
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020e8459ea
移除kepler2200A与Kepler2200B RT Device中的chiller
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1 year ago |
|
lixiang
|
fdb9fa780e
修复PM界面钟摆阀与加热可以打开多个窗体的bug
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1 year ago |
|
lixiang
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d8b75084d0
添加RT UI 模块选择功能
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1 year ago |
|
lixiang
|
34bdc228de
Datalog添加高温Heater温度显示
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1 year ago |
|
lixiang
|
15742217b9
添加工艺结束流气与关GasFinal阀中间添加1s延时
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1 year ago |
|
lixiang
|
f8026cadbc
控压结束动作bug修复
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1 year ago |
|
lixiang
|
967f6b6b9c
添加控压结束，保持一秒流气功能
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1 year ago |
|
lixiang
|
022b366a65
分页功能bug修复
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1 year ago |
|
lixiang
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665bb2ee1d
域名测试
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1 year ago |
|
lixiang
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08e85396fc
1.添加eventview分页功能
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1 year ago |
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sangwq
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6745f225c7
enhance the throughput calculation.
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1 year ago |
|
lixiang
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ed84923822
OverView界面Abort绑定System.IsBusy
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1 year ago |
 intern02
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a4752168de
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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1 year ago |
|
intern02
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879532d9c9
Upload loss file.
|
1 year ago |
|
sangwq
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
|
1 year ago |
|
intern02
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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1 year ago |
|
lixiang
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5e8bf0ff14
1.重绘window窗体
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1 year ago |
|
sangwq
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236244c8a0
redesign wtw clean function and fix auto vent bug.
|
1 year ago |
|
zhouhr
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a84b9b9f89
add CheckLoad in HongHuVR a&& add TMRobot Home for SE
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1 year ago |
 chenkui
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8696faac36
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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1 year ago |
|
chenkui
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
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1 year ago |
|
lixiang
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ef3841f212
atm模式移除PM控压
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1 year ago |
|
chenkui
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c49311bc46
EventItem default construction parameter id is 1029;
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1 year ago |
|
lixiang
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cfed419b0a
解决ValueTuple版本冲突
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1 year ago |
