 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 年之前 |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 年之前 |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 年之前 |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 年之前 |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 年之前 |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 年之前 |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 年之前 |
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zhouhr
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b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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1 年之前 |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 年之前 |
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zhouhr
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1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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1 年之前 |
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zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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1 年之前 |
