 lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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1 year ago |
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lixiang
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33d0cd73dd
1.修复Pump Counter 显示错误bug
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1 year ago |
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lixiang
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99d939492e
1.加登出界面
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1 year ago |
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lixiang
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5ce110574e
1，添加cooling功能
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1 year ago |
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lixiang
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c8af7de363
将kepler与Venus UI配置分开，添加Heat Routine
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1 year ago |
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lixiang
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f9e665093f
修复钟摆阀界面打开报错bug
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1 year ago |
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lixiang
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0f905564d0
加入登录界面和权限管理
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1 year ago |
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lixiang
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f74076f457
1.修复LP3不能create job，ui界面显示错误的bug
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 years ago |
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lixiang
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8582fd7e94
Venus初始版本提交
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3 years ago |
