 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 gadu atpakaļ |
 sangwq
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03063bae6a
Enhance the routine framework.
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2 gadi atpakaļ |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
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2 gadi atpakaļ |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
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2 gadi atpakaļ |
|
lixiang
|
d3c29df415
Venus修复传片bug
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2 gadi atpakaļ |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
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2 gadi atpakaļ |
|
lixiang
|
ec1eeba67c
添加数据分析界面
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2 gadi atpakaļ |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
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2 gadi atpakaļ |
|
lixiang
|
62f1a16025
1.添加PartialPressure界面
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2 gadi atpakaļ |
|
sangwq
|
46261ca338
enhance wafer manager.
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2 gadi atpakaļ |
|
sangwq
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c3154ba629
wafer manager.
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2 gadi atpakaļ |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
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2 gadi atpakaļ |
