 lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
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lixiang
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c671c999c0
ui界面优化
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1 year ago |
 hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
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lixiang
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b5616b7378
解决冲突，合并代码
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2 years ago |
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lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
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lixiang
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a5813eb09d
1.修改chamber wafer样式
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2 years ago |
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lixiang
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fce40bc900
1.解决分子泵/chiller在线显示bug
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2 years ago |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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2 years ago |
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lixiang
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796541e5a6
现场测试修改MFC Calibration/LeakCheck/VATPerformance功能
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
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lixiang
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39fe214261
1.完善PartialPressure 功能
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2 years ago |
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lixiang
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bb33e89998
1，优化UI界面
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2 years ago |
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lixiang
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ccb4444fa8
添加部分ui按钮控制rt功能
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2 years ago |
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lixiang
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65b982deaf
优化漏气check界面
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2 years ago |
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lixiang
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081ab4daa5
添加多个UI界面
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2 years ago |
