 lixiang
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99d939492e
1.加登出界面
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1 year ago |
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lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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1 year ago |
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lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
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lixiang
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e81e8a5c12
IoSensor和管路 优化
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1 year ago |
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lixiang
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ed7c537c19
1.添加TM/LLA/LLB 平衡阀
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1 year ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
 hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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f0c8f8caa5
解决pm界面不能run recipe bug
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2 years ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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2 years ago |
 zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
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lixiang
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00d42e8c17
efem动画优化
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2 years ago |
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lixiang
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5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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2 years ago |
|
lixiang
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28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
|
lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
|
lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
|
lixiang
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bdec2c0d74
1.修改TM robot模拟器
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2 years ago |
|
lixiang
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93b4531b7b
robot 不能home问题提交
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2 years ago |
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lixiang
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be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
