 sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
|
2 years ago |
|
sangwq
|
75314148f5
Added Auto Pump/vent option.
|
2 years ago |
|
sangwq
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
sangwq
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
2 years ago |
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sangwq
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a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
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sangwq
|
8f9b95ae8f
Develop transfer cycle.
|
2 years ago |
|
sangwq
|
5fc13b3f0c
New Efem design
|
2 years ago |
