 sangwq
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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sangwq
|
ec2f97e62d
enhance log.
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1 year ago |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
 lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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1 year ago |
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sangwq
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7d93bf0076
Job Clean function, not finished.
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1 year ago |
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sangwq
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a35c5b1224
enhance routing algorithm.
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1 year ago |
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sangwq
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c223835b1e
enhance AutoCycle module.
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1 year ago |
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sangwq
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5b037046f9
Add TM/LL modules.
|
2 years ago |
