 lixiang
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401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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9 months ago |
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lixiang
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e81e8a5c12
IoSensor和管路 优化
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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10 months ago |
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lixiang
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d33079596b
1.优化新版跑片动画
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11 months ago |
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lixiang
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8d613c7d1f
奈思UI 新版动画
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11 months ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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11 months ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
 hecl
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6c7190339c
Fix exception caused by OperationOverView,TMOperationView,TopView,TMView
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
 chenkui
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5740a76224
1、ControlJobInfo类增加了SequenceNameList,解决LoadPort UI中Sequence显示问题
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1 year ago |
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chenkui
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4359bcf776
1、修复了AbortJob无法选择Sequence的问题
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1 year ago |
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lixiang
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f74076f457
1.修复LP3不能create job，ui界面显示错误的bug
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1 year ago |
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chenkui
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5cf3c54d79
1、RouteManager增加了StopJob,AbortJob等
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1 year ago |
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lixiang
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af631c4aaa
1.添加RF Calibration功能
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1 year ago |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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5e8bf0ff14
1.重绘window窗体
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1 year ago |
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lixiang
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038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
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1 year ago |
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lixiang
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410df462f5
从AutoCycle获取已经运行job做Pause功能
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1 year ago |
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lixiang
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c3f0679404
UI界面添加Pause/Resume功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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818383115c
UI优化
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
 zhouhr
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187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
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1 year ago |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 year ago |
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hecl
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8e5ec35137
Add tansfer checkpage add fix bug about show step
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1 year ago |
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lixiang
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ac251b02cc
1.主界面添加LLA/LLB ATM/VAV显示
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1 year ago |
