 lixiang
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e29f6e8e46
1.优化UI界面性能
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8 months ago |
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lixiang
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17c3d36a2b
Sequence 界面 PM REcipe 支持选择 Pre Clean/Post Clean/WTW Clean 和 Process Recipe
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8 months ago |
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lixiang
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b67769ec2c
ui优化
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8 months ago |
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lixiang
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65d80057c2
ui优化
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9 months ago |
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lixiang
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99d939492e
1.加登出界面
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9 months ago |
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lixiang
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5ce110574e
1，添加cooling功能
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10 months ago |
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lixiang
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3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
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10 months ago |
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lixiang
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2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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10 months ago |
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lixiang
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e81e8a5c12
IoSensor和管路 优化
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10 months ago |
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lixiang
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a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
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10 months ago |
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lixiang
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9163903164
Kepler2200优化
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11 months ago |
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lixiang
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c671c999c0
ui界面优化
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11 months ago |
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lixiang
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3e00375ce8
1.FDC代码逻辑移到PricessDefine
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1 year ago |
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lixiang
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e00ff4f30d
1.高温Heater position1-position5加上动画
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1 year ago |
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lixiang
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87f1121180
1.Recipe UI 界面Name优化
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1 year ago |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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lixiang
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8b6a73425d
添加Start job 前check kepler2200 高温Heater温度
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1 year ago |
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lixiang
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0f0650b80f
1.PM 界面 run recipe 变为手动模式
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1 year ago |
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lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 year ago |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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lixiang
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d8b75084d0
添加RT UI 模块选择功能
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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lixiang
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c0ff9f251e
1.添加kepler2200B
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1 year ago |
