 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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zhouhr
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dc38e4a4a8
fix bug in Venus SE Swap
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1 year ago |
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zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
 intern02
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0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
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1 year ago |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 year ago |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 year ago |
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zhouhr
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a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
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1 year ago |
