 zhouhr
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3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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10 mēneši atpakaļ |
 sangwq
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 mēneši atpakaļ |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 mēneši atpakaļ |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 mēneši atpakaļ |
|
zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 gadu atpakaļ |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 gadu atpakaļ |
|
zhouhr
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9d9b666ea4
Venus SE Update
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1 gadu atpakaļ |
|
zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 gadu atpakaļ |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 gadu atpakaļ |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
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1 gadu atpakaļ |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 gadu atpakaļ |
|
zhouhr
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b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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1 gadu atpakaļ |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 gadu atpakaļ |
|
zhouhr
|
1e7c808d19
add VenusSE tm related module in ui rt simulator && fix efem backround bug
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1 gadu atpakaļ |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
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1 gadu atpakaļ |
