 zhouhr
|
253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
|
10 mesi fa |
|
zhouhr
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 mesi fa |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
1 anno fa |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
1 anno fa |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 anno fa |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
|
1 anno fa |
|
zhouhr
|
1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
|
1 anno fa |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
1 anno fa |
 sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
|
1 anno fa |
|
zhouhr
|
883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
|
1 anno fa |
 lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
1 anno fa |
|
lixiang
|
f3bd6b016b
添加部分efem功能
|
1 anno fa |
|
sangwq
|
652afa77f9
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
1 anno fa |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
1 anno fa |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 anni fa |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 anni fa |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 anni fa |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 anni fa |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 anni fa |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 anni fa |
|
sangwq
|
3cad102221
更新 RT
|
2 anni fa |
