 lixiang
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38b40b702d
1.修复all in all out 不做cooling bug
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7 months ago |
 zhouhr
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b6ab013e1b
fix some miss function in SE/DE Recipe && Improve VenusDispatcher
|
8 months ago |
 sangwq
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1d60dcb593
Fix the bugs about Exclude/Include feature.
|
1 year ago |
|
sangwq
|
9189e1b51f
new routing algorithm update.
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1 year ago |
|
sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
|
1 year ago |
|
sangwq
|
ec2f97e62d
enhance log.
|
1 year ago |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
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1 year ago |
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sangwq
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
|
lixiang
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9e1de0e343
1.run recipe 参数bool改recipetype
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1 year ago |
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sangwq
|
7d93bf0076
Job Clean function, not finished.
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1 year ago |
|
sangwq
|
a35c5b1224
enhance routing algorithm.
|
1 year ago |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
1 year ago |
|
sangwq
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5b037046f9
Add TM/LL modules.
|
2 years ago |
