 sangwq
|
4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 éve%!(EXTRA string=óta) |
|
sangwq
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 éve%!(EXTRA string=óta) |
|
sangwq
|
236244c8a0
redesign wtw clean function and fix auto vent bug.
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1 éve%!(EXTRA string=óta) |
|
sangwq
|
7d93bf0076
Job Clean function, not finished.
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1 éve%!(EXTRA string=óta) |
|
sangwq
|
3e445737a6
Align functions.
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1 éve%!(EXTRA string=óta) |
 lixiang
|
b6acfe2e29
优化TM leak check功能
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1 éve%!(EXTRA string=óta) |
|
lixiang
|
72ac29dac2
1.优化PMC Kepler2200A界面
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1 éve%!(EXTRA string=óta) |
 yangdb
|
5987f80b26
1.增加sequence控件以及sequence内容编辑保存
|
1 éve%!(EXTRA string=óta) |
|
lixiang
|
a728a5bab5
添加修改配置文件功能模块
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2 éve%!(EXTRA string=óta) |
