 lixiang
|
99d939492e
1.加登出界面
|
9 mēneši atpakaļ |
|
lixiang
|
5ce110574e
1，添加cooling功能
|
10 mēneši atpakaļ |
|
lixiang
|
3fb3984bd3
1.添加 Heater 伺服到位信号，手臂进腔前check
|
10 mēneši atpakaļ |
|
lixiang
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
10 mēneši atpakaļ |
|
lixiang
|
9163903164
Kepler2200优化
|
11 mēneši atpakaļ |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 mēneši atpakaļ |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
|
11 mēneši atpakaļ |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 gadu atpakaļ |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 gadu atpakaļ |
|
lixiang
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 gadu atpakaļ |
|
lixiang
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 gadu atpakaļ |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 gadu atpakaļ |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 gadu atpakaļ |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 gadu atpakaļ |
|
lixiang
|
c0ff9f251e
1.添加kepler2200B
|
1 gadu atpakaļ |
