 zhouhr
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ea68c5c25d
add clean for Venus SE.
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1 éve%!(EXTRA string=óta) |
 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
9d9b666ea4
Venus SE Update
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
8436daeb68
Eliminate SE generation warning.
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1 éve%!(EXTRA string=óta) |
 intern02
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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1 éve%!(EXTRA string=óta) |
|
intern02
|
109e1ee3a2
Added SE Robot movement, updated and uploaded VenusSeOperationOverViewModel.cs, VenusSeOperationOverView.xaml, SERobot.cs, HongHuVR.cs, SETMEntity.cs, Generic, SERobot1.xaml, SERobot2.xaml .
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
724b0ca304
add ReturnWafer for Venus SE.
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 éve%!(EXTRA string=óta) |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
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2 éve%!(EXTRA string=óta) |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 éve%!(EXTRA string=óta) |
|
zhouhr
|
b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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2 éve%!(EXTRA string=óta) |
|
zhouhr
|
b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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2 éve%!(EXTRA string=óta) |
