 lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
|
2 years ago |
 sangwq
|
d900c241bd
开发 AutoCycle 模块， 进行中
|
2 years ago |
|
lixiang
|
dbf06a2134
添加TM Operation界面
|
2 years ago |
|
lixiang
|
334e242cf0
修改wafer样式
|
2 years ago |
|
lixiang
|
a98fe05338
再次提交
|
2 years ago |
|
lixiang
|
a5813eb09d
1.修改chamber wafer样式
|
2 years ago |
 yangdb
|
69ce19d6d6
1.sequence控件移除多余的dll引用
|
2 years ago |
 Intern01
|
5c0e111942
解决冲突
|
2 years ago |
|
lixiang
|
546436c2c7
模拟器读取chamber bug修改
|
2 years ago |
|
Intern01
|
c8473cb60c
1.增加Fa模块事件上报相关接口FaEvet，与recipejob,loadportjob事件上报接口
|
2 years ago |
|
yangdb
|
045eae5c75
1.sequence和recipe修改日志输出格式
|
2 years ago |
|
lixiang
|
e52d3832a4
模拟器chamber选择由手动改动变为都rt配置文件
|
2 years ago |
|
lixiang
|
263a29b83b
换电脑
|
2 years ago |
|
lixiang
|
a6ac889dc6
底部按钮添加背景色
|
2 years ago |
|
lixiang
|
a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
|
2 years ago |
|
yangdb
|
5987f80b26
1.增加sequence控件以及sequence内容编辑保存
|
2 years ago |
|
lixiang
|
3a078d515d
1.修复ui灯闪烁错误bug
|
2 years ago |
|
Intern01
|
35c331e65f
topview解决冲突
|
2 years ago |
|
Intern01
|
004b31d77e
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
lixiang
|
072e5d0d01
ui Module TM 名变TMRobot
|
2 years ago |
|
lixiang
|
7fe847dfd8
1.分开Venus/Kepler OverView界面，之前公用一个Overview界面
|
2 years ago |
|
sangwq
|
8826cc0cd0
开发 AutoCycle 模块， 增加TMRobot module id.
|
2 years ago |
|
Intern01
|
23c59d3c86
1.完成FA模块的功能开发
|
2 years ago |
|
sangwq
|
d014b232e1
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
lixiang
|
6dd42b5fb0
添加process数据分析功能
|
2 years ago |
|
lixiang
|
d3c29df415
Venus修复传片bug
|
2 years ago |
|
sangwq
|
a4dfe941cc
Debug EFEM device driver.
|
2 years ago |
|
sangwq
|
e64484a52f
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
lixiang
|
530ddcbae7
优化topview界面
|
2 years ago |
|
sangwq
|
c9282deeeb
EFEM Driver and simulator functions.
|
2 years ago |
