 hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 jaar geleden |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 jaar geleden |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 jaar geleden |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 jaar geleden |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 jaar geleden |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 jaar geleden |
