 hecl
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ed38ed5c95
1.check load function bugs fix
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1 year ago |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
 lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
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1 year ago |
 sangwq
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03063bae6a
Enhance the routine framework.
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2 years ago |
 zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
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sangwq
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9ba5d70aff
fix abort manual transfer bug.
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2 years ago |
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lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
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2 years ago |
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lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
|
lixiang
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e63db2ef65
提交
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2 years ago |
|
lixiang
|
93b4531b7b
robot 不能home问题提交
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
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2 years ago |
