 hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
 lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
5e8bf0ff14
1.重绘window窗体
|
1 year ago |
|
zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
 sangwq
|
03063bae6a
Enhance the routine framework.
|
2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
|
2 years ago |
|
sangwq
|
d22b60372f
Debug devices on tools
|
2 years ago |
|
lixiang
|
ffda76b488
修改rt与ui交互功能
|
2 years ago |
|
sangwq
|
bf48d9b6c5
AIRSYS CHILLER AND GAS VERIFICATION
|
2 years ago |
|
sangwq
|
a244b205b9
Gas Flow and RF Power routine.
|
2 years ago |
