 zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
 lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
|
lixiang
|
f3bd6b016b
添加部分efem功能
|
2 years ago |
 sangwq
|
652afa77f9
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
2 years ago |
|
sangwq
|
66557b65bb
TMCycle not finished.
|
2 years ago |
|
lixiang
|
280432bb82
1.TM传片动画制作，UI界面优化
|
2 years ago |
|
lixiang
|
a48b743e88
1.完成PartialPressure功能
|
2 years ago |
|
sangwq
|
a54944a308
PM TM Wafer Transfer Ready.
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
8565810192
Servo Pressure and Gas Flow done.
|
2 years ago |
|
sangwq
|
af96d139ff
2022年11月24日 提交 RT 部分更改
|
2 years ago |
|
sangwq
|
3cad102221
更新 RT
|
3 years ago |
