 zhouhr
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26a6aa8f41
fix bug in SE Swap && SE Cycle
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1 rok temu |
 intern02
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0dfd2f80f0
add VCE view in UI && add currentSlot for VceEntity while GotoSlot over && fix bug of SE SwapRoutine.
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1 rok temu |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 rok temu |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 rok temu |
