 zhouhr
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dd99f38e54
change the system by configtype in App.config in RT,Simulator && change the temp by chillertype in VenusDE
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vor 10 Monaten |
 sangwq
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
|
vor 11 Monaten |
|
sangwq
|
e61f018b66
Manual Return wafer while running cycle.
|
vor 1 Jahr |
|
sangwq
|
b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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vor 1 Jahr |
|
sangwq
|
9144014f90
enhance the routing algorithm and module online/offline control logic.
|
vor 1 Jahr |
|
sangwq
|
5b037046f9
Add TM/LL modules.
|
vor 2 Jahren |
