 lixiang
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20cc441578
1.kepler2200 ui优化
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1 year ago |
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lixiang
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3f6c65223f
1.删除部分不需要插入数据库数据
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1 year ago |
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lixiang
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ad6fa7b5dc
1.添加chamber界面创建wafer，开关门功能
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1 year ago |
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lixiang
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cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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1 year ago |
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lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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1 year ago |
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lixiang
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72ac29dac2
1.优化PMC Kepler2200A界面
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1 year ago |
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lixiang
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4a6cf3aa4c
pm interlock报错修改
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1 year ago |
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lixiang
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b96ac701fb
1.添加TM Simulator
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1 year ago |
|
lixiang
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4ffafb6001
EFEM界面优化
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1 year ago |
|
lixiang
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179f80c29a
1.endpoint by wcf 添加修改配置文件界面
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1 year ago |
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lixiang
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f3bd6b016b
添加部分efem功能
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1 year ago |
 sangwq
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aaf8372896
兼容 两种 endpoint, 未完成
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1 year ago |
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sangwq
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16f00701e5
Redesign Recipe module.
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1 year ago |
|
lixiang
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de406b964e
1.添加EFEM等ui界面
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1 year ago |
|
lixiang
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a64bed3d6c
1.Run recipe 功能现场修改
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1 year ago |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 year ago |
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sangwq
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c3154ba629
wafer manager.
|
2 years ago |
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sangwq
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4e8a55f733
Endpoint Module.
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2 years ago |
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sangwq
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3222fa143a
Process module and Interlock .
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2 years ago |
|
sangwq
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d8e5f1dc2c
2022 last update
|
2 years ago |
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sangwq
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0050803370
update process Module
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2 years ago |
