 zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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11 miesięcy temu |
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zhouhr
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2e70549fc8
fix bug in StationNumber(Aligner1)
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11 miesięcy temu |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 miesięcy temu |
 sangwq
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75b6c4548e
submit new venus routing algorithm.
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11 miesięcy temu |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 miesięcy temu |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 rok temu |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 rok temu |
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zhouhr
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5836f3ed1c
fix bugs in ShareDrive && add Online in SETM
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1 rok temu |
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zhouhr
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 rok temu |
 hecl
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d15749f5b1
1.fix VenusSE show chiler temp bugs
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1 rok temu |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 rok temu |
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hecl
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d331213da1
1.SETM Pressure Control update
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1 rok temu |
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zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 rok temu |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 rok temu |
 intern02
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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1 rok temu |
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intern02
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109e1ee3a2
Added SE Robot movement, updated and uploaded VenusSeOperationOverViewModel.cs, VenusSeOperationOverView.xaml, SERobot.cs, HongHuVR.cs, SETMEntity.cs, Generic, SERobot1.xaml, SERobot2.xaml .
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1 rok temu |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 rok temu |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 rok temu |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 rok temu |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 rok temu |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 rok temu |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 rok temu |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 rok temu |
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zhouhr
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1c44773767
Add missing files
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1 rok temu |
