 zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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zhouhr
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 year ago |
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zhouhr
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f5a709d29f
enhance ReturnWafer for VenusSE && fix bugs in VCE Routine, HongHuTM
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1 year ago |
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zhouhr
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724b0ca304
add ReturnWafer for Venus SE.
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1 year ago |
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zhouhr
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376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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1 year ago |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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2 years ago |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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2 years ago |
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zhouhr
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b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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2 years ago |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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2 years ago |
